Semiconductor Equipment Heater Manufacturer

Frequently Asked Questions

• Q: What does "low outgassing" mean and why is it important?

• A: Outgassing is the release of trapped gases from a material in a vacuum. In semiconductor manufacturing, these gases can condense on wafers and cause defects. Low-outgassing materials like polyimide are essential.

• Q: Can you make a heater that fits the complex shape of our chuck?

• A: Yes, our specialty is custom design. We can work from your CAD model to create a polyimide or etched foil heater that conforms perfectly to your chuck's geometry.

• Q: How do you ensure temperature uniformity across a wafer chuck?

• A: We use advanced thermal modeling software to design the heater circuit. This allows us to compensate for edge losses and create a perfectly uniform temperature field across the entire chuck surface.

• Q: Can you integrate temperature sensors into the heater?

• A: Absolutely. We can integrate very thin RTDs or thermocouples directly into the heater assembly, providing the most accurate and responsive temperature feedback possible.

• Q: What is the typical lead time for a custom semiconductor heater?

• A: Due to the precision and materials involved, lead times are typically 4-6 weeks. We can provide an expedited service for prototyping.

• Q: Are your heaters compatible with high-vacuum environments?

• A: Yes, our polyimide and ceramic heaters are specifically designed for high-vacuum applications due to their low outgassing and thermal stability.

• Q: Can you provide material certification and testing data?

• A: Yes, we provide full material traceability and can supply outgassing test data (e.g., ASTM E595) and other performance reports to qualify the heater for your equipment.

• Q: Do you offer cleanroom assembly?

• A: Yes, for critical applications, we can perform final assembly and packaging in a controlled cleanroom environment to ensure the heater meets your cleanliness specifications.